Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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'''Training video: [http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 LabSpin6]''' | '''Training video: [http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.057_Manual_Spin_Coater-720p.mp4 LabSpin6]''' | ||
===Process information=== | |||
Spin curves (LabSpin 6): [[media:AZ5214E_spin_curve.pdf|AZ 5214E]], [[media:Spin_curve_nLoF2020.pdf|AZ nLOF 2020]], [[media:Spin_curve_ZEP520A.pdf|ZEP 520A]], [[media:Spin_curve_Fox-15.pdf|FOX-15]], [[media:AZ_4562_spin_curve.pdf|AZ 4562]], [[Specific_Process_Knowledge/Lithography/CSAR#Spin_Curves|CSAR 6200]] | Spin curves (LabSpin 6): [[media:AZ5214E_spin_curve.pdf|AZ 5214E]], [[media:Spin_curve_nLoF2020.pdf|AZ nLOF 2020]], [[media:Spin_curve_ZEP520A.pdf|ZEP 520A]], [[media:Spin_curve_Fox-15.pdf|FOX-15]], [[media:AZ_4562_spin_curve.pdf|AZ 4562]], [[Specific_Process_Knowledge/Lithography/CSAR#Spin_Curves|CSAR 6200]] | ||