Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
| Line 76: | Line 76: | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*In general: Not so good | *In general: Not so good | ||
* | *BPSG: Floats at 1000<sup>o</sup>C | ||
| | | | ||
*In general: Not so good | *In general: Not so good | ||
* | *BPSG: Floats at 1000<sup>o</sup>C | ||
| | | | ||
*In general: Not so good | *In general: Not so good | ||
* | *BPSG: Floats at 1000<sup>o</sup>C | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Film quality | |style="background:LightGrey; color:black"|Film quality | ||