Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|PECVD | !colspan="2" border="none" style="background:silver; color:black;" align="center"|PECVD | ||
|style="background:WhiteSmoke; color:black"|<b>PECVD2</b> | |style="background:WhiteSmoke; color:black"|<b>PECVD2</b> - ''Will be decommissioned soon!'' | ||
|style="background:WhiteSmoke; color:black"|<b>PECVD3</b> | |style="background:WhiteSmoke; color:black"|<b>PECVD3</b> | ||
|style="background:WhiteSmoke; color:black"|<b>PECVD4</b> | |style="background:WhiteSmoke; color:black"|<b>PECVD4</b> [[Image:section under construction.jpg|70px]] | ||
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||