Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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* Clean all bottles on the outside with anisole or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | * Clean all bottles on the outside with anisole or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | ||
* Find a label to your resist bottle; bottles without labels will be removed from the cleanroom. | * Find a label to your resist bottle; bottles without labels will be removed from the cleanroom. | ||
* | * Write name, group and date on your bottle. | ||
When spin coating e-beam resist, you should use a pipette to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the thread that will soon dry out and leave particles in the resist. | When spin coating e-beam resist, you should use a pipette to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the thread that will soon dry out and leave particles in the resist. | ||