Specific Process Knowledge/Lithography/Coaters: Difference between revisions

@@ Line 240: / Line 240: @@
 *'''_DCH_100mm_AZ5214E_1,5um'''
 Spin-off: 10 s at 2300 rpm closed followed by 10s at 3500 rpm open.
-Soft bake: 90s at 90°C in contact
+Soft bake: 90 s at 90°C in contact
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@@ Line 279: / Line 280: @@
 *'''_DCH_100mm_AZ5214E_2,2um'''
 Spin-off: 40 s at 2200 rpm open.
-Soft bake: 60s at 90°C in contact
+Soft bake: 60 s at 90°C in contact
 *'''_DCH_100mm_AZ5214E_1,5um'''
 Spin-off: 60 s at 725 rpm open with exhaust closed followed by 10s at 3500 rpm open.
-Soft bake: 90s at 95°C in 1 mm proximity
+Soft bake: 90 s at 95°C in 1 mm proximity
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