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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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''Flow names, process parameters, and test results:''
''Flow names, process parameters, and test results:''
*'''DCH 100mm 1,5µm AZ5214E'''
*'''_DCH_100mm_AZ5214E_1,5um'''
Spin-off: xx s at yyyy rpm.
Spin-off: 10 s at 2300 rpm closed followed by 10s at 3500 rpm open.
Soft bake: 90s at 90°C in contact


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*'''_DCH_100mm_AZ5214E_2,2um'''
Spin-off: 40 s at 2200 rpm open.
Soft bake: 60s at 90°C in contact
 
*'''_DCH_100mm_AZ5214E_1,5um'''
Spin-off: 60 s at 725 rpm open with exhaust closed followed by 10s at 3500 rpm open.
Soft bake: 90s at 95°C in 1 mm proximity


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