|
|
| Line 745: |
Line 745: |
| 120sec on 120C hot plate | | 120sec on 120C hot plate |
| 120sec on 220C hot plate. (Spinning curve made by Alexandra Lupi <allu@fotonik.dtu.dk>) | | 120sec on 220C hot plate. (Spinning curve made by Alexandra Lupi <allu@fotonik.dtu.dk>) |
|
| |
| ==Spin Coater: Manual Standard Resists ==
| |
|
| |
| [[Image:Spin coater Manual Labspin in A-5.jpg|300x300px|thumb|Spin coater: Manual Standard Resists in E-5]]
| |
|
| |
| '''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_coater:_Manual_Standard_Resists click here]'''
| |
|
| |
| The Spin coater: Manual Labspin is a SÜSS Labspin6 coater built into a fumehood. The spin coater is only for standard resists; please consult ''[[Specific_Process_Knowledge/Lithography/Coaters#Coaters:_Comparison_Table|the coater comparison table]]'' for more information.
| |
|
| |
|
| |
| '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=362 LabManager]'''
| |
|
| |
|
| |
| <br clear="all" />
| |
|
| |
|
| == Manual Spin Coaters == | | == Manual Spin Coaters == |