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Specific Process Knowledge/Thin film deposition/ALD Picosun R200: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,366 edits
Line 87: Line 87:
|style="background:LightGrey; color:black"|Batch size
|style="background:LightGrey; color:black"|Batch size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1-5 4" wafers
*1-5 100 mm wafers
*1-5 6" wafers
*1-5 150 mm wafers
*Several smaller samples  
*Several smaller samples  
|-
|-
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