Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 434: | Line 434: | ||
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 LabManager]''' | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 LabManager]''' | ||
===[[Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing|Process information]]=== | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||