Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions

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-!3
+!Film Quality
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-*SiO<sub>2</sub>
+*Less than thermal oxide. Annealing makes it more dense.
-Can be doped with boron
+*Few defects
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-*Si<sub>x</sub>O<sub>y</sub>H<sub>z</sub>
+*Less dense film
-Can be doped with boron, phosphorus or germanium
+*Incorporation of hydrogen in the film
-|
-*Not measured (a sputter target with stoichiometry SiO<sub>2</sub> is used)
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-*Not measured (a sputter target with stoichiometry SiO<sub>2</sub> is used
+*
+|
+*
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