Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
Appearance
| Line 153: | Line 153: | ||
|- | |- | ||
|- style="background:LightGray" valign="top" | |- style="background:LightGray" valign="top" | ||
| | | Nickel (320µm) | ||
| Green(532nm/255mm) | | Green(532nm/255mm) | ||
| 200 kHz | | 200 kHz | ||