Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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| Silicon | | Silicon | ||
| | | Red (1064nm/255mm) | ||
| 200 kHz | |||
| 100% | |||
| | |||
| | | | ||
| | | | ||
| ?? mm/s | | ?? mm/s | ||
| | | | ||