Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

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Laser Micromachining Tool

The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG.

The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc.

The machine is located in the basement of building 346 under the cleanroom.

The user manual(s), user APV(s), technical information and contact information can be found in LabManager:

The Laser Micromachining Tool in LabManager

It is equipped with 2 high power lasers:

a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm and a
a 100W nanosecond laser with a wavelength of 1064nm.

It consist of these main parts:

Upper service way
Manual front door
Operating panel
Machine's feet (adjustable)
Left service way
Electrical cabinet

Process information

Laser Processing details

Material	Optics	Frequency	Intensity	Writing speed	Other	Parameter file
Silicon	Red (1064nm/255mm)		100%	?? mm/s		silicon cutting.par
Silicon with SiliconNitride	Red (1064nm/255mm)		100%	?? mm/s		silicon-SiN cutting.par
Borofloat glass	Red (1064nm/255mm)		100%	?? mm/s		borofloat cutting.par
Nickel	Red (1064nm/255mm)		100%	?? mm/s		nickel cutting red.par
Nickel	Green (532nm/255mm)	200 kHz	100%	300 mm/s	Fixed Burst mode, 3 pulses. Sky writing mode 3.	nickel cutting green parameters
Mask making	Blue (355nm/103mm)		20%	?? mm/s		mask making.par

The parameter filename extension is here set to .doc because of MediaWiki restrictions. The 3DMM laser software uses .par as parameter file extension.
The file should be a pure text-file with no formatting codes etc.

@@ Line 41: / Line 41: @@
 === Laser Processing details ===
- The parameter filename extension is here set to .doc because of MediaWiki restrictions. The 3DMM laser software uses .par as parameter file extension.
- The file should be a pure text-file with no formatting codes etc.
 {| {{table}}
 | align="left" valign="top" style="background:LightGray"|''' Material'''
 | align="left" valign="top"  style="background:LightGray"|''' Optics'''
+| align="left" valign="top" style="background:LightGray"|''' Frequency'''
 | align="left" valign="top" style="background:#DCDCDC;"|''' Intensity'''
 | align="left" valign="top" style="background:LightGray"|''' Writing speed'''
+| align="left" valign="top" style="background:LightGray"|''' Other'''
 | align="left" valign="top" style="background:LightGray"|''' Parameter file'''
 |- style="background:LightGray" valign="top"
 | Silicon
 | Red (1064nm/255mm)
+|
 | 100%
 | ?? mm/s
+|
 | [[silicon cutting.par]]
 |- style="background:LightGray" valign="top"
 | Silicon with SiliconNitride
 | Red (1064nm/255mm)
+|
 | 100%
 | ?? mm/s
+|
 | [[silicon-SiN cutting.par]]
 |- style="background:LightGray" valign="top"
 | Borofloat glass
 | Red (1064nm/255mm)
+|
 | 100%
 | ?? mm/s
+|
 | [[borofloat cutting.par]]
 |- style="background:LightGray" valign="top"
 | Nickel
 | Red (1064nm/255mm)
+|
 | 100%
 | ?? mm/s
+|
 | [[nickel cutting red.par]]
 |- style="background:LightGray" valign="top"
 | Nickel
 | Green (532nm/255mm)
+| 200 kHz
 | 100%
-| ?? mm/s
+| 300 mm/s
+| Fixed Burst mode, 3 pulses. Sky writing mode 3.
 | [[media:Nickel_shim_3_bursts_532nm%2C_F_255mm.doc|nickel cutting green parameters]]
 |- style="background:LightGray" valign="top"
 | Mask making
 | Blue (355nm/103mm)
+|
 | 20%
 | ?? mm/s
+|
 | [[mask making.par]]
 |-
 |}
+ The parameter filename extension is here set to .doc because of MediaWiki restrictions. The 3DMM laser software uses .par as parameter file extension.
+ The file should be a pure text-file with no formatting codes etc.