Specific Process Knowledge/Back-end processing/Laser Micromachining Tool

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Laser Micromachining Tool

Lasertool microSTRUCT vario (3D-Micromac AG)

Inside lasertool

The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG.

The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc.

The machine is located in the basement of building 346 under the cleanroom.

The user manual(s), user APV(s), technical information and contact information can be found in LabManager:

The Laser Micromachining Tool in LabManager

It is equipped with 2 high power lasers:

• a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm and a
• a 100W nanosecond laser with a wavelength of 1064nm.

It consist of these main parts:

• Upper service way
• Manual front door
• Operating panel
• Machine's feet (adjustable)
• Left service way
• Electrical cabinet

Process information

• Silicon cutting and milling
• Borofloat glass cutting and milling
• Quartz cutting and milling
• Nickel cutting and milling (for Polymer Injection Molder)
• Mask making

Laser Processing details

The parameter filename extension is here set to .doc because of MediaWiki restrictions. The 3DMM laser software uses .par as parameter file extension.
The file should be a pure text-file with no formatting codes etc.

Material	Optics	Intensity	Writing speed	Parameter file
Silicon	Red (1064nm/255mm)	100%	?? mm/s	silicon cutting.par
Silicon with SiliconNitride	Red (1064nm/255mm)	100%	?? mm/s	silicon-SiN cutting.par
Borofloat glass	Red (1064nm/255mm)	100%	?? mm/s	borofloat cutting.par
Nickel	Red (1064nm/255mm)	100%	?? mm/s	nickel cutting red.par
Nickel	Green (532nm/255mm)	100%	?? mm/s	nickel cutting green parameters
Mask making	Blue (355nm/103mm)	20%	?? mm/s	mask making.par