Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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**2": X +/- 8-22mm; Y +/- 0-6mm | **2": X +/- 8-22mm; Y +/- 0-6mm | ||
**4": X +/- 14-46mm; Y +/- 0-10mm | **4": X +/- 14-46mm; Y +/- 0-10mm | ||
**6": X +/- 14-69mm; Y +/- 0-10mm | **6": X +/- 14-69mm; Y +/- 0-10mm (OBS: Max. separation of BSA microscopes is 100mm) | ||