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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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|Dose test
|Dose test
|Last QC value ± 20 mJ/cm<sup>2</sup> (9 steps total)
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Step size is 5 mJ/cm<sup>2</sup>
Test range is last QC value ± 10 mJ/cm<sup>2</sup> (5 steps total)
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|Defoc test
|Defoc test
|Last QC value ± 8 (9 steps total)
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Step size is 1 defoc
Test range is last QC value ± 4 (5 steps total)
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