Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions
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|few nm to >200 nm | |few nm to >200 nm | ||
|few nm to ? | |few nm to ? | ||
|few nm to | |few nm to 600 nm * | ||
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'''*''' If you wish to deposit a thicker layer than 100 nm please talk to responsible staff or write to thinfilm@nanolab.dtu.dk | '''*''' If you wish to deposit a thicker layer than 100 nm please talk to responsible staff or write to thinfilm@nanolab.dtu.dk | ||