Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Difference between revisions
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|[https://www.microresist.de/en/produkt/ma-n-2400-series/ Micro Resist Technology] | |[https://www.microresist.de/en/produkt/ma-n-2400-series/ Micro Resist Technology] | ||
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|[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: LabSpin 02/03]] | |[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: LabSpin 02/03]] | ||
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