Specific Process Knowledge/Lithography/SU-8: Difference between revisions

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 <span style="color:red">'''Note:''' Since the SU-8 is epoxy-based, users are required to take the mandatory epoxy safety course "Personlig sikkerhed ved arbejde med epoxy". Registration to this course can be found on [https://www.inside.dtu.dk/en/medarbejder/hr-og-arbejdsmiljoe/kompetenceudvikling/kursusoversigt_overside/kursusoversigt/arbejdsmiljoe-og-beredskabskurser/epoxy-kursus?fs=1 DTU Inside]</span> - '''requires login'''
-In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''', '''SU-8 2035''', and '''SU-8 2075''' are supplied by Nanolab. Other resist formulations can be used, but has to be ordered by the user.
+In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''', '''SU-8 2035''', and '''SU-8 2075''' are supplied by Nanolab.
+Considering discontinuation of the SU-8 2000 series we need to move to another product.
+After we had a meeting with MicroResist and got some recommendation from them.
+We can currently offer the following replacement materials by Kayaku Advanced Materials, USA (KAM):
+Current Product 	Target Coat Thickness 	Recommended Product
+SU-8 2010 or less 	≤ 10 μm 	SU-8 3000 or SU-8 TF 6000 series
+SU-8 2010 through SU-8 2050 	10 μm ≤ x ≤ 50 μm 	SU-8 3000 series
+SU-8 2075 or greater 	> 50 μm 	SU-8 XFT75 & SU-8 XFT100
+After an internal conversation we have decided to try new followings products:
+SU8 3005 instead of SU8 2005
+SU8 3035 instead of SU8 2035
+SU8 XFT75 instead of SU8 2075
+And we will also try a new formulation SU8 3025.