Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 240: Line 240:
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
|AR-P 6200.04
|AR-P 6200.04
| 1 L
| 0.25 L
| 2026
| 2019
| 1
| 0.25
 
|-
|-style="background:WhiteSmoke; color:black"
|AR-P 6200.04
| 0.25 L
| 2019
| 0.1


|}
|}