Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Difference between revisions
Appearance
| Line 224: | Line 224: | ||
|- | |- | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
|'''Resist''' | |'''Resist''' | ||
|'''Bottle size''' | |'''Bottle size''' | ||
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|'''Approximate amount remaining [L]''' | |'''Approximate amount remaining [L]''' | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|AR-P 6200.04 | |AR-P 6200.04 | ||
| 1 L | | 1 L | ||