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Specific Process Knowledge/Thin film deposition/ALD Picosun R200: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,366 edits
Line 96: Line 96:
*1-5 100 mm wafers
*1-5 100 mm wafers
*1-5 150 mm wafers
*1-5 150 mm wafers
*1-3 200 mm wafers
*Several smaller samples  
*Several smaller samples  
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