Specific Process Knowledge/Lithography/SU-8: Difference between revisions
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PhD Thesis by Thomas Anhøj (February 2007) on process optimization of 40 µm thick SU-8 25 for lab-on-a-chip. | PhD Thesis by Thomas Anhøj (February 2007) on process optimization of 40 µm thick SU-8 25 for lab-on-a-chip. | ||
*[https://orbit.dtu.dk/en/publications/fabrication-of-high-aspect-ratio-su-8-structures-for-integrated-s Fabrication of high aspect ratio SU-8 structures for integrated spectrometers] | *[https://orbit.dtu.dk/en/publications/fabrication-of-high-aspect-ratio-su-8-structures-for-integrated-s Fabrication of high aspect ratio SU-8 structures for integrated spectrometers] | ||
*[[ | *[[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=4&name=TAA_Defense_070420.pdf|Slides from defence]] - requires login | ||