Specific Process Knowledge/Lithography/SU-8: Difference between revisions
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==Phd. work on the topic== | ==Phd. work on the topic== | ||
==PhD dissertations== | ==PhD dissertations== | ||
PhD Thesis by Thomas Anhøj (February 2007) on process optimization of 40 µm thick SU-8 25 for lab-on-a-chip. | |||
* | *[https://orbit.dtu.dk/en/publications/fabrication-of-high-aspect-ratio-su-8-structures-for-integrated-s Fabrication of high aspect ratio SU-8 structures for integrated spectrometers] | ||
*[[media:TAA Defense 070420.pdf|Slides from defence]] | |||