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Specific Process Knowledge/Lithography/SU-8: Difference between revisions

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In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''', '''SU-8 2035''', and '''SU-8 2075''' are supplied by Nanolab. Other resist formulations can be used, but has to be ordered by the user.  
In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''', '''SU-8 2035''', and '''SU-8 2075''' are supplied by Nanolab. Other resist formulations can be used, but has to be ordered by the user.  


'''Process recommendations:'''
'''Process recommendations:'''
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/SU-8"