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* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2  (the CORE process)]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2  (the CORE process)]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand|Black silicon on Demand]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Black silicon on Demand|Black silicon on Demand]]
* [[/ORE with Al2O3 mask|The ORE process with Al2O3 mask]]
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