Specific Process Knowledge/Characterization/Profiler: Difference between revisions
→Stylus Profiler (Tencor P17): added acceptance tests |
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'''Acceptance test''' | '''Acceptance test''' | ||
*Acceptance measurements on the P17: [[Media:Appendix 3 Acceptance test p17 final_v2_Completed.pdf]] | *Acceptance measurements on the P17: [[Media:Appendix 3 Acceptance test p17 final_v2_Completed.pdf]] | ||
*Vendor's own conformity test results after installation: [[:File:Acceptance P17 ctd results.pdf]] | |||
===Equipment performance and process related parameters=== | ===Equipment performance and process related parameters=== | ||