Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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Line scan X: 20 µm to 200 mm in a single scan. No stitching. | Line scan X: 20 µm to 200 mm in a single scan. No stitching. | ||
Map scan XY: In principle any rectangle that can be inscribed in a 200 mm circle | Map scan XY: In principle any rectangle that can be inscribed in a 200 mm circle, but resolution is limited to max. 4 million points and scanning is slow. In practice to get good resolution scan a very small area (e.g., 100 x 500 µm) | ||
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|style="background:LightGrey; color:black"|Scan range Z | |style="background:LightGrey; color:black"|Scan range Z | ||