Specific Process Knowledge/Lithography/Descum: Difference between revisions
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Recipe settings: | Recipe settings: | ||
Kept power setting constant at Power: 100% and vary | Kept power setting constant at Power: 100% and vary oxygen flow during process. | ||
[[image:AZMIR701_pressure_settings.png|right|frame|400x400px| Descum results for different pressure settings]] | [[image:AZMIR701_pressure_settings.png|right|frame|400x400px| Descum results for different pressure settings]] | ||
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{| border="1" cellspacing="1" cellpadding="2" align="center" | {| border="1" cellspacing="1" cellpadding="2" align="center" | ||
|- style="background:LightGrey" | |- style="background:LightGrey" | ||
| ||FW/REV|| C2/C1 || | | ||FW/REV|| C2/C1 || Oxygen || Pressure | ||
|- | |- | ||
|'''recipe 1'''|| 100/0 || 53/31 || 5 || 0,2 | |'''recipe 1'''|| 100/0 || 53/31 || 5 || 0,2 | ||
| Line 226: | Line 226: | ||
Recipe settings: | Recipe settings: | ||
Kept power setting constant at Power: 100% and vary | Kept power setting constant at Power: 100% and vary oxygen flow during process. | ||
| Line 234: | Line 234: | ||
{| border="1" cellspacing="1" cellpadding="2" align="center" | {| border="1" cellspacing="1" cellpadding="2" align="center" | ||
|- style="background:LightGrey" | |- style="background:LightGrey" | ||
| ||FW/REV|| C2/C1 || | | ||FW/REV|| C2/C1 || Oxygen || Pressure | ||
|- | |- | ||
|'''recipe 1'''|| 100/0 || 53/31 || 17 || 0,4 | |'''recipe 1'''|| 100/0 || 53/31 || 17 || 0,4 | ||