Specific Process Knowledge/Lithography/Descum: Difference between revisions
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Machine is equipt with 2 gaslines: oxydgen and nitrogen, but all test run with oxydgen as recommended by Diener. | Machine is equipt with 2 gaslines: oxydgen and nitrogen, but all test run with oxydgen as recommended by Diener. | ||
Ashing of AZ MiR701 resist | '''Ashing of AZ MiR701 resist''' | ||
[[image:AZMIR701_power_settings.png|right|frame|400x400px| Descum results for different power settings]] | [[image:AZMIR701_power_settings.png|right|frame|400x400px| Descum results for different power settings]] | ||
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Ashing of AZ5214E resist | |||
'''Ashing of AZ5214E resist''' | |||