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Finally the substrates are dried in air in the drying box or with a nitrogen gun.
Finally the substrates are dried in air in the drying box or with a nitrogen gun.
==Phd. work on the topic==
==PhD dissertations==
*PhD Thesis by Thomas Anhøj (February 2007) on process optimization of 40µm thick SU-8 25 for lab-on-a-chip.
**[[media:TAA Dissertation 070604 s.pdf|Fabrication of High Aspect Ratio SU-8 Structures for Integrated Spectrometers]]
**[[media:TAA Defense 070420.pdf|Slides from defence]]
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