Specific Process Knowledge/Thermal Process/A4 Phosphor Pre-dep furnace: Difference between revisions
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*Phosphorus pre-deposition using POCl<sub>3</sub> | *Phosphorus doping/pre-deposition using POCl<sub>3</sub> | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | ||