Specific Process Knowledge/Lithography/Descum: Difference between revisions

@@ Line 86: / Line 86: @@
 |'''Ashing time (min)'''|| 1|| 2 || 3 || 5 || 7
 |-
-|'''Etched Thickness (nm)'''|| 6,28 || 102,99 || 76,92 || N/A || N/A
+|'''Etched Thickness (nm)'''|| 1,68 || 76,51 || 169,72 || 481,96 || 272,59
 |-
 |}