Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions
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So far the following results can be used as a guide or reference: | So far the following results can be used as a guide or reference: | ||
(Look for updated information in a specific material list.) | |||
http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition | |||