Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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*Confocal profiling | *Confocal profiling | ||
*PSI (Phase Shift Interferometry) | *PSI (Phase Shift Interferometry) | ||
* | *CSI (Coherence Scanning Interferometry) | ||
*Active illumination (Ai) Focus Variation | |||
*High resolution thin film thickness measurement using reflectrometry | *High resolution thin film thickness measurement using reflectrometry | ||
*Stitched scans | *Stitched scans | ||