Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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The accuracy of a height measurement with the profiler depends on the measurement settings, the sample, the instrument calibration and the resolution. | The accuracy of a height measurement with the profiler depends on the measurement settings, the sample, the instrument calibration and the resolution. | ||
==== | ====Use the right measurement settings for your sample==== | ||
Both the force setting and the scan speed are important: Too high force may compress a soft material like Al, Au or some polymers, while too low force may lead to the stylus "jumping" over features, especially if the scan speed is high. | Both the force setting and the scan speed are important: Too high force may compress a soft material like Al, Au or some polymers, while too low force may lead to the stylus "jumping" over features, especially if the scan speed is high. | ||