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Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions

Bghe (talk | contribs)
Bghe (talk | contribs)
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|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|style="background:WhiteSmoke; color:black"|<0.15nm RMS
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|z accuracy
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm)
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm)
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|-
|style="background:silver; color:black"|
|style="background:silver; color:black"|