Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<0.15nm RMS | |style="background:WhiteSmoke; color:black"|<0.15nm RMS | ||
|style="background:WhiteSmoke; color:black"|<0.15nm RMS | |style="background:WhiteSmoke; color:black"|<0.15nm RMS | ||
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|style="background:silver; color:black"| | |||
|style="background:LightGrey; color:black"|z accuracy | |||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm) | |||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm) | |||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||