Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions
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*Almost any that will not degas and is not very poisonous | *Almost any that will not degas and is not very poisonous | ||
*See cross-contamination | *See [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 cross-contamination sheet] | ||
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*Silicon | *Silicon | ||