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Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions

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==InP etching June 2018==
==InP etching June 2018==
''Done by Kabi and Bghe @danchip''
''Done by Kabi and Bghe @nanolab''


===Sample pattern before etching===
===Sample pattern before etching===