Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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==InP etching June 2018== | ==InP etching June 2018== | ||
''Done by Kabi and Bghe @ | ''Done by Kabi and Bghe @nanolab'' | ||
===Sample pattern before etching=== | ===Sample pattern before etching=== | ||