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Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
Line 48: Line 48:
|Selectivity (InP:HSQ)
|Selectivity (InP:HSQ)
|15:1 (2"), 20:1
|15:1 (2"), 20:1
|-
|Other tests
|Comparing this recipe with the Cl2/H2 recipe: Click here
|-
|-
|}
|}
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