Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions
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*SiO<sub>2</sub> | *SiO<sub>2</sub> | ||
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*Si<sub>x</sub>O<sub>y</sub>H<sub>z</sub> | *Si<sub>x</sub>O<sub>y</sub>H<sub>z</sub> | ||
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*SiO<sub>2</sub> | *SiO<sub>2</sub> | ||
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*Si<sub>x</sub>O<sub>y</sub>H<sub>z</sub> | *Si<sub>x</sub>O<sub>y</sub>H<sub>z</sub> | ||