Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
| Line 318: | Line 318: | ||
Since this system is a spray nozzle that creates a puddle of developer on the substrate the spray is on for 10s. to cover any type of substrates, however this procedure starts the actual development, and the "idle" time is hence shortened accordingly. | Since this system is a spray nozzle that creates a puddle of developer on the substrate the spray is on for 10s. to cover any type of substrates, however this procedure starts the actual development, and the "idle" time is hence shortened accordingly. | ||
The system is setup so that 10s. in the Developer E-beam correlates to 10s. in a beaker, however all designs are different and larger or smaller structures may need different development times. | The system is setup so that 10s. in the Developer E-beam correlates to 10s. in a beaker, however all designs are different and larger or smaller structures may need different development times. | ||
<br> | |||
== Cold development == | |||
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#top|Go to top of this page]]</span> | |||
[[Image:Coolplate2.jpg|250px|right|]] | |||
We do have the possibility of making cold development, to get more vertical and smoother sidewalls. We have a coolplate that can go down to -2 C, with a ramp of app. 3 C/min. | |||
Is it recommended to make a dose test, if one is to transfer from ordinary development to cold. | |||
'''Procedure''' | |||
# Pour developer suited for your resist into a small blue cap bottle, and label it, remember to mark it with lotnumber, date and your name. | |||
# Leave this small bottle of developer in the fridge in Cx1 at least overnight to acclimatize. | |||
# Take the coolplate located in D3 (see picture) and connect it in Fumehood 10 (E-beam) place it on the sink-lid to keep a good airflow. | |||
# Hold left button on the front panel of the coolplate and set temperature with up/down arrows. | |||
# The coolplate can go down to -2°C, and the fridge is +5°C hence use a beaker and pour cold developer into it and place on the coolplate, leave it to acclimatize for the desired temperature. | |||
Development time in cold development, should be subject to testing, depending on structure size and density, but is comparable with "normal" development times. | |||
When developing at low temperatures, condensation can occur | |||
'''Remember to clean up after you are done''' | |||