Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
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=Recipes on PECVD2 for deposition of silicon oxides= | =Recipes on PECVD2 for deposition of silicon oxides EXPIRED!!!= | ||
==Quality control recipe (recipe changed in June 2015)== | ==Quality control recipe (recipe changed in June 2015)== | ||
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=Recipes on PECVD1 for deposition of silicon oxides <span style="color:Red">Expired!</span>= | =Recipes on PECVD1 for deposition of silicon oxides <span style="color:Red">Expired!</span>= | ||