Specific Process Knowledge/Lithography/Coaters: Difference between revisions
Appearance
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|style="background:LightGrey; color:black"|Priming temperature | |style="background:LightGrey; color:black"|Priming temperature | ||
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120 °C | |||
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|style="background:LightGrey; color:black"|Spin speed | |style="background:LightGrey; color:black"|Spin speed | ||