Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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* Clean all bottles on the outside with anisole or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | * Clean all bottles on the outside with anisole or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | ||
* Find a label to your resist bottle; bottles without labels will be removed from the cleanroom. | * Find a label to your resist bottle; bottles without labels will be removed from the cleanroom. | ||
* Write name, group and date on your bottle. | * Write name, Lotnumber, group and date on your bottle. | ||