Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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[[Image:KSspinner.JPG|300x300px|right|thumb|The KS spinner is placed in C-1]] | [[Image:KSspinner.JPG|300x300px|right|thumb|The KS spinner is placed in C-1]] | ||
In April 2015, the KS Spinner was decommissioned and replaced by ''[[Specific_Process_Knowledge/Lithography/Coaters# | In April 2015, the KS Spinner was decommissioned and replaced by ''*[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_RCD8|Spin Coater: RCD8]]''* | ||
'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#KS_Spinner click here]''' | '''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#KS_Spinner click here]''' | ||