Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 463: | Line 463: | ||
* AZ nLOF 2020 1.5-5 µm | * AZ nLOF 2020 1.5-5 µm | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameters | ||
|style="background:LightGrey; color:black"|Spin speed | |style="background:LightGrey; color:black"|Spin speed | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
| Line 471: | Line 471: | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
10 - 10000 rpm/s | 10 - 10000 rpm/s | ||
|- | |||
|style="background:LightGrey; color:black"|Hotplate temperature | |||
|style="background:WhiteSmoke; color:black" align="center"| | |||
20 - 200 °C | |||
|- | |||
|style="background:LightGrey; color:black"|Cool plate temperature | |||
|style="background:WhiteSmoke; color:black" align="center"| | |||
21 °C | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||