Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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* SU-8 resits 0.1-100+ µm | * SU-8 resits 0.1-100+ µm | ||
* AZ 5214E 1.5- | * AZ 5214E 1.5-3 µm | ||
* AZ 4562 | * AZ 4562 8-15 µm | ||
* AZ MiR 701 | * AZ MiR 701 1.5-3 µm | ||
*AZ nLOF 2020 | * AZ nLOF 2020 2-3.5 µm | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameters | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameters | ||