Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
Appearance
| Line 132: | Line 132: | ||
| 1 burst | | 1 burst | ||
| none | | none | ||
| 4 | | 4 | ||
| 1 | | 1 | ||
| N/A | | N/A | ||
| Line 161: | Line 161: | ||
| 3 burst | | 3 burst | ||
| none | | none | ||
| 4320 | | 4320 | ||
| 1 | | 1 | ||
| N/A | | N/A | ||
| Line 176: | Line 176: | ||
| 1 burst | | 1 burst | ||
| none | | none | ||
| 99 | | 99 | ||
| 13 | | 13 | ||
| 20 µm | | 20 µm | ||