Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

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 | align="left" valign="top" style="background:LightGray"|''' Material'''
 | align="left" valign="top" style="background:LightGray"|''' Pattern'''
+| align="left" valign="top" style="background:LightGray"|''' Number of parallel lines'''
+| align="left" valign="top" style="background:LightGray"|''' Gap in between line [µm]'''
 | align="left" valign="top"  style="background:LightGray"|''' Optics'''
 | align="left" valign="top" style="background:LightGray"|''' Frequency'''
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 |- style="background:LightGray" valign="top"
 | Silicon
+|
 |
+|
 | Red (1064nm/255mm)
 |
@@ Line 129: / Line 133: @@
 |- style="background:LightGray" valign="top"
 | Silicon with SiliconNitride
+|
+|
 |
 | Red (1064nm/255mm)
@@ Line 135: / Line 141: @@
 | ?? mm/s
 |
+| [[silicon cutting.par]]
 |-
 |}